Instructor-in-Charge: Dr. N. N. Sharma
Course objective:
Overview, history and industry perspective;
working principles; mechanics and dynamics,
thermofluid engineering; scaling law;
microactuators, microsensors, and
microelectromechanical systems; microsystem
design, modeling and simulation; materials,
packaging; microfabrication: bulk, surface,
LIGA, etc; micromanufacturing;
microfludidics; microrobotics; case studies.
Course handout:
Click
here to download (for registered users
only)
Course material:
Click
here to download (for registered users
only)
